Equipment Catalog

Access our comprehensive inventory of metrology, lithography, and fabrication instruments.

Maintenance Notice: Cleanroom Bay 2 humidity control servicing scheduled for Dec 15-16.
LAB EQUIPMENT. BROWSE ALL
Metrology
Available

B2 Atomic Force Microscope

AFM
Room 145Nano-surface analysis
About Book
Deposition
Available

High-Vacuum Sputter System

Sputter
Room 145Thin film deposition
Book
Lithography
Available

UV Mask
Aligner

Mask Aligner
Yellow RoomMicron precision
Book
Lithography
Available

Programmable Spin Coater

Spin Coater
Fume Hood 2Photoresist application
Book
Packaging
Available

Wedge Wire
Bonder

Wire Bonder
Room 145Chip interconnects
Book
Metrology
Limited Access

Stylus
Profilometer

Profilometer
Room 145Step height measurement
Book
Etching
Maintenance

O2 Plasma
Cleaner

Plasma Cleaner
Room 142Surface activation
Electrical
Available

Four-Point
Probe

4 Point Probe
Bench 4Resistivity checks
Book
Microscopy
Available

Keyence
VHX 7000

Keyence
Lab 102Digital Imaging
About Book
Thermal
Not Available

Tystar
Furnace

Furnace
Bay 3Oxidation
Etching
Available

Acid Wet
Bench

Wet Bench
Bay 2Chemical Etching
Book

Lab Resources

SOP Database Chemical Safety (SDS) Training Videos Report Issue