Standard Setup in Room 102
Instrument Overview
The Keyence VHX-7000 is our flagship optical metrology system, bridging the gap between traditional optical microscopy and SEM (Scanning Electron Microscopy). It utilizes a 4K CMOS sensor and advanced lighting algorithms to capture fully-focused images of uneven surfaces instantly.
Ideal for: Wafer inspection, MEMS device characterization, Failure analysis, and Roughness measurements.
Sample Gallery
PCB Solder Joint
Silicon Etch Profile
MEMS Structure (3D)
Technical Specifications
| Sensor | 1/1.8-inch CMOS image sensor |
| Effective Pixels | 3840 (H) x 2160 (V) |
| Frame Rate | 50 fps (max) |
| Illumination | High-intensity LED (Ring, Coaxial, Mixed) |
| Stage | Motorized XYZ with 100mm x 100mm travel |
| Data Output | .JPEG, .TIFF, .CSV (Measurement data) |
Usage Rates
Academic / Internal
$45/hr
Unassisted Use
External / Industry
$120/hr
Staff Assisted: +$50/hr
