Karl Suss MA6 (Mask Aligner)
Available • Cleanroom Bay 1
Good
Zeiss Sigma 300 (SEM)
Available • Metrology Lab
Good
Oxford PlasmaPro (RIE)
Maintenance Required
Offline
Reservation Summary
Equipment:
Karl Suss MA6
Date:
Jan 15, 2026
Time:
10:00 AM - 11:00 AM